Abstract
Superconducting cavities with high quality factors play an essential role in circuit quantum electrodynamics and quantum computing. In measurements of the the intrinsic loss rates of high frequency modes, it can be challenging to design an appropriate coupling to the measurement circuit in such a way that the resulting signal is sufficiently strong but also that this coupling does not lead to unwanted loading circuit, obscuring the intrinsic internal loss rates. Here, we propose and demonstrate a spectroscopic probe of high-Q resonators based on the phenomena of electromagnetically-induced transparency (EIT) between the resonator and qubit in the weak dispersive coupling regime. Applying a sideband drive signal to the qubit, we observe an interference dip originated from EIT in the qubit spectroscopy, originating from the quantum interference between the qubit probe signal and sideband transition. From the width and the depth of the dip, we are able to extract the single-photon linewid