Abstract
Cross-entropy benchmarking (XEB) with single-qubit reference sequences is widely used to characterize multi-qubit gates in large-scale quantum processors, despite the lack of a rigorous theoretical justification. Here we show that the commonly employed additive single-qubit errors approximation underlying this approach breaks down and leads to a systematic overestimation of gate fidelities. We derive an analytical expression for the joint decay of simultaneous single-qubit reference sequences and introduce a refined expression for the interleaved gate fidelity estimation. Experiments on a superconducting quantum processor validate the theory and demonstrate that fidelities obtained using XEB with single-qubit references agree with those extracted from standard interleaved randomized benchmarking (IRB), while achieving higher precision due to reduced reference-sequence errors. Our results establish theoretical foundation for the single-qubit-based XEB and show that, with appropriate post-processing, it enables a reliable and robust approach for entangling gates benchmarking without the need for multi-qubit Clifford reference sequences.