Abstract
We report on the internal quality factor of a three-dimensional niobium quarter-wave coaxial cavity, with mid-temperature annealing, exhibiting at the single-photon level below 20\,mK, which corresponds to an internal photon lifetime of . Moreover, of the mid-temperature annealed cavities remains almost unchanged even after several cooldown cycles and air exposure. These results suggest that stable low-loss niobium oxides might be formed by mid-temperature annealing on the surface of three-dimensional niobium cavity. This surface treatment could be applicable to the fabrication of 2D superconducting circuits and help improve the lifetime of Nb-based superconducting qubits.