Abstract
Rydberg atom arrays constitute a promising quantum information platform, where control over several hundred qubits has been demonstrated. Further scaling could significantly benefit from coupling to integrated optical or electronic devices, enabling quantum networking and new control tools, but this integration is challenging due to Rydberg sensitivity to the electric field noise from surfaces. We demonstrate that Rydberg coherence and two-atom entanglement can be generated and maintained at distances of 100 microns from a nanoscale dielectric device. Using coherent manipulation of individual qubits and entanglement-assisted sensing, we map the spatio-temporal properties of the electric field environment, enabling its control and the integration of Rydberg arrays with micro- and nanoscale devices.