Abstract
Modern Superconducting QUantum Interference Devices (SQUIDs) are commonly fabricated from either Al or Nb electrodes, with an in-situ oxidation process to create a weak link between them. However, common problems of such planar nano- and micro-SQUIDs are hysteretic current-voltage curves, and a shallow flux modulation depth. Here, we demonstrate the formation of both Josephson junctions and SQUIDs using a dry transfer technique to stack and deterministically misalign flakes of NbSe₂; allowing one to overcome these issues. The Josephson dynamics of the resulting twisted NbSe₂-NbSe₂ junctions are found to be sensitive to the misalignment angle of the crystallographic axes. A single lithographic process was then implemented to shape the Josephson junction into a SQUID geometry with typical loop areas of ≃ 25 μ m² and weak links ≃ 600 nm wide. These devices display large stable current and voltage modulation depths of up to Δ I_c ≃ 75% and Δ V ≃ 1.4 mV respectively.